- Available Technology
Fast Fabrication, Nanocrystalline SMO, Gas Sensors, Precise Deposition
This process is integrated with three laser processing technologies. Predesigned circuit patterns were fabricated on an Au-coated transparent glass substrate using a picosecond laser, which ablated the Au-coating from the back of the substrate to pattern the circuits. A picosecond laser transmits through the glass substrate at the gaps between two electrodes to ablate a SMO target to deposit the SMO nanonetwork layer on the fabricated circuits. The obtained SMO nanonetwork was in-situ post-annealed by a CO2 laser to fine-tune the crystallinity.
• Much faster fabrication time than other methods
• Precise deposition area control, no need for fine tuning
• Allows for flexible material properties control
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